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Single Cluster

PVSK Tandem Single Cluster System

KOREA KIYON’s Perovskite Tandem Single Cluster System is capable of handling large-area G12 (210 mm × 210 mm) substrates, providing an integrated deposition environment that includes Plasma Treatment, HTL / ETL / PVK Evaporation, TCO Sputtering, and ALD (SnO)

  • Integrated Deposition System for Perovskite/Si Tandem Solar Cell Layer Formation
  • Independent deposition chambers for HTL / ETL / PVK / TCO / Interconnecting Layer ensure the highest film purity and performance.
  • Vacuum transfer robot enables seamless non-stop processing for enhanced productivity.
  • Built-in 10-slot cassette load-lock system allows continuous operation and chamber-specific processing.
  • Hybrid Wet & Dry Process solution realized with in-glovebox coating equipment.
  • Equipped with an in-situ monitoring system for real-time measurement of perovskite formation during deposition.

Process-integrated in-situ metrology system
for spectrally resolved photoluminescence measurements


  • In-situ spectral photoluminescence measurements
  • Excitation wavelength
  • Data storage (spectra, deduced parameter)
  • Automated measurement mode during process

KK-CU/GB-210-PSC

  • Application
    Perovskite Solar Cell
  • Sample Size
    Max 210mm x 210mm (M12)
  • Process Module
    • Plasma Treatment Module
    • HTL Evaporator Module
    • PVK Evaporator Module (Substrate Cooling & Heating (-25℃ ~150℃)) /
      In-Situ Monitoring Tool Inside Wall Cooling and Corrosion Protection Special Coating
    • ETL Evaporator Module
    • TCO Sputter Module (Plasma Damage Free System)
    • ALD Module (SnO Deposition)
  • Deposition Source
    • Plasma Treat: O2, H2 Plasma Treat (ICP,CCP Source)
    • PVK: Effusion Cell Source (Hi-Temp + Low Temp)
    • HTL, ETL: Effusion Cell Source (Hi-Temp + Low Temp)
    • Sputter: RF Sputter (ITO, NiO Deposition)_ Plasma damage free
    • ALD: DOT (Dioctyltin) + H2O , 3canister + 1reactants
  • Glovebox
    • Double Side Glovebox
    • Dry Process Zone: Connecting Cluster System
    • Wet Process Zone: Slot Die Coater Integration
    • Dual Purification System
  • System Control
    • Full Auto Control: PC Control
    • Program: Visual Basic + PLC Program
    • Rate Control: Feedback Rate Control (5A ~ 0.1A Rate Control)
    • 4~5 Source Co-depo Control
  • Key Spec.
    • 210mm x 210 mm (G12 Sample)
    • Substrate Cooling & Heating (-25℃ ~150℃)
    • In-Situ Monitoring Tool (EL / PL / Bandgap Energy real-time measurement)
    • 4~6 Source Co-Depo Control / Plasma Damage Free TCO Layer
    • Auto Filp Module for ALD Process

Information on collection and use of personal information

  • 1. Introduction At KOREAKIYON Co.,Ltd we are committed to protecting your personal data and ensuring transparency in how your information is collected, used, disclosed, and safeguarded across all our digital services, including websites, applications, connected devices, and customer support platforms.

  • 2. What Information We Collect We may collect and process the following categories of personal information: Identifiers (e.g., name, email address, phone number) Technical data (e.g., IP address, browser type, device ID) Usage data (e.g., browsing activity, access time, pages visited) Location data (if permitted) Cookies and similar tracking technologies

  • 3. How We Use Your Information We use the collected data for the following purposes: To provide and improve our products and services To respond to customer inquiries and offer support To personalize content and marketing communications To conduct analytics and enhance user experience To comply with legal and regulatory obligations

  • 4. Legal Basis for Processing We rely on the following legal grounds for processing your personal data: Your explicit consent Fulfillment of a contract Compliance with legal obligations Legitimate business interests

  • 5. Your Rights Depending on your location, you may have the following rights: Access to personal information we hold about you Correction or update of inaccurate data Deletion of your data (“right to be forgotten”) Restriction or objection to processing Data portability Withdrawal of consent at any time Right to opt-out of the sale of personal data To exercise your rights, please contact us at [accounting@glovebox.co.kr].

  • 6. Sharing and Disclosure We do not sell your personal data. Trusted service providers who perform services on our behalf (e.g., analytics, marketing, hosting) Government authorities or law enforcement if legally required

  • 7. Cookies and Tracking Technologies We use cookies and similar tools to: Analyze website traffic and performance Provide personalized experiences Enable core website functionalities You can control cookie preferences through your browser settings.

  • 8. International Transfers Your data may be transferred to and stored in countries outside your country of residence, including countries that may not offer the same level of data protection.

  • 9. Data Retention We retain your personal data only for as long as necessary to fulfill the purposes described in this policy or as required by applicable laws and regulations.

  • 10. Security We implement industry-standard technical and organizational measures to ensure the confidentiality, integrity, and availability of your personal information.

  • 11. Changes to This Policy We may update this Privacy Policy from time to time. Any significant changes will be communicated through notices on our website and will indicate the “Effective Date” at the top of this page.

  • 12. Contact Us If you have any questions, concerns, or requests regarding this Privacy Policy or your personal data, please contact us at: KOREAKIYON Co., Ltd. - Management Support Division

  • Email: [accounting@koreakiyon.com]

    Mailing Address: [486 Seobusaetgil Geumcheongu Seoul, South Korea 08588]

웹사이트내 이메일주소 무단 수집 거부 정책 안내입니다.

본 웹사이트에 게제된 모든 이메일 주소는 개인정보보호법 제15조(개인정보의 수집·이용)에 따라 개인정보를 수집할 수 있는 각 호의 경우를 제외하고, 무단으로 수집되는 것을 거부합니다.

제15조(개인정보의 수집·이용)

  • 1. 개인정보처리자는 다음 각 호의 어느 하나에 해당하는 경우에는 개인정보를 수집할 수 있으며 그 수집 목적의 범위에서 이용할 수 있다.

    - 정보주체의 동의를 받은 경우

    - 법률에 특별한 규정이 있거나 법령상 의무를 준수하기 위하여 불가피한 경우

    - 공공기관이 법령 등에서 정하는 소관 업무의 수행을 위하여 불가피한 경우

    - 정보주체와의 계약의 체결 및 이행을 위하여 불가피하게 필요한 경우

    - 정보주체 또는 그 법정대리인이 의사표시를 할 수 없는 상태에 있거나 주소불명 등으로 사전 동의를 받을 수 없는 경우로서 명백히 정보주체 또는 제3자의 급박한 생명, 신체, 재산의 이익을 위하여 필요하다고 인정되는 경우

    - 개인정보처리자의 정당한 이익을 달성하기 위하여 필요한 경우로서 명백하게 정보주체의 권리보다 우선하는 경우. 이 경우 개인정보처리자의 정당한 이익과 상당한 관련이 있고 합리적인 범위를 초과하지 아니하는 경우에 한한다.

  • 2. 개인정보처리자는 제1항제1호에 따른 동의를 받을 때에는 다음 각 호의 사항을 정보주체에게 알려야 한다. 다음 각 호의 어느 하나의 사항을 변경하는 경우에도 이를 알리고 동의를 받아야 한다.

    - 개인정보의 수집·이용 목적

    - 수집하려는 개인정보의 항목

    - 개인정보의 보유 및 이용 기간

    - 동의를 거부할 권리가 있다는 사실 및 동의 거부에 따른 불이익이 있는 경우에는 그 불이익의 내용